Double patternig scheme for sub-0.25 k1 single damascene structures at NA=0.75, l=193nm

Maenhoudt, MireilleMireilleMaenhoudtVersluijs, JankoJankoVersluijsStruyf, HerbertHerbertStruyfVan Olmen, JanJanVan OlmenVan Hove, MarleenMarleenVan Hove2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10821Double patternig scheme for sub-0.25 k1 single damascene structures at NA=0.75, l=193nmProceedings paper