Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

Chanson, RomainRomainChansonLefaucheux, P.L.P.L.LefaucheuxDussart, R.R.DussartTillocher, T.T.TillocherShen, P.P.ShenUrabe, K.K.UrabeDussarat, C.C.DussaratMaekawa, K.K.MaekawaYatsuda, K.K.YatsudaTahara, S.S.Taharade Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28002Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)Meeting abstracthttp://www2.avs.org/symposium2017/Papers/Paper_EM-ThP5.html