Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly

Seidel, RobertRobertSeidelRincon Delgadillo, PaulinaPaulinaRincon DelgadilloRamirez-Hernandez, AbelardoAbelardoRamirez-HernandezWu, HengpengHengpengWuHer, YougnjunYougnjunHerYin, JianJianYinGronheid, RoelRoelGronheidNealey, PaulPaulNealeyde Pablo, JuanJuande Pablo2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24504Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assemblyProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854369