3D features measurement using Yieldstar, an angle resolved polarized scatterometer

Charley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayD'have, KoenKoenD'haveCheng, ShauneeShauneeChengHinnen, P.P.HinnenLi, FahongFahongLiVanoppen, PeterPeterVanoppenDusa, MirceaMirceaDusa2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/186533D features measurement using Yieldstar, an angle resolved polarized scatterometerProceedings paper