De Wolf, IngridIngridDe WolfHoward, DaveDaveHowardMaex, KarenKarenMaexMaes, HermanHermanMaes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1174Phase and mechanical stress in and surrounding TiSi2 and CoSi2 lines studied by micro-Raman spectroscopyProceedings paper