Multi-contrast benchmarking of edge illumination Monte Carlo simulations using virtual gratings

Sanctorum, JonathanJonathanSanctorumSijbers, JanJanSijbersDe Beenhouwer, JanJanDe Beenhouwer2025-03-212025-03-212025-MAR 10021-8979WOS:001441485600003https://imec-publications.be/handle/20.500.12860/45429Multi-contrast benchmarking of edge illumination Monte Carlo simulations using virtual gratingsJournal article10.1063/5.0244152WOS:001441485600003DIFFERENTIAL PHASE-CONTRASTCODED-APERTUREWAVE OPTICSX-RAYSINTERFEROMETRYVISIBILITYREFRACTIONPLATFORMMODELSGATE