Copper-ruthenium system study for advanced hybrid BEOL -interconnects applications

Jourdan, NicolasNicolasJourdanKorytov, MaximMaximKorytovVan Elshocht, SvenSvenVan ElshochtTokei, ZsoltZsoltTokei2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33234Copper-ruthenium system study for advanced hybrid BEOL -interconnects applicationsProceedings paper