Ronse, KurtKurtRonseVandenberghe, GeertGeertVandenbergheJaenen, PatrickPatrickJaenenDelvaux, ChristieChristieDelvauxVangoidsenhoven, DizianaDizianaVangoidsenhovenVan Roey, FriedaFriedaVan RoeyPollers, IngridIngridPollersMaenhoudt, MireilleMireilleMaenhoudtGoethals, MiekeMiekeGoethalsPollentier, IvanIvanPollentierVleeming, BertBertVleemingvan Ingen Schenau, K.K.van Ingen SchenauHeskamp, B.B.HeskampDavies, G.G.DaviesFinders, JoJoFindersNiroomand, ArdavanArdavanNiroomand2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4709Status of ArF lithography for the 130nm technology nodeProceedings paper