Polarity dependence of bias temperature instabilities in Hf(x)Si(1-x)ON/TaN gate stacks

Aoulaiche, MarcMarcAoulaicheHoussa, MichelMichelHoussaDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10020Polarity dependence of bias temperature instabilities in Hf(x)Si(1-x)ON/TaN gate stacksProceedings paper