Modeling mobility degradation due to remote Coulomb scattering from dielectric charges and its impact on MOS device performance

Lujan, GuilhermeGuilhermeLujanRagnarsson, Lars-AkeLars-AkeRagnarssonKubicek, StefanStefanKubicekDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9227Modeling mobility degradation due to remote Coulomb scattering from dielectric charges and its impact on MOS device performanceProceedings paper