Optimization toward Non-Zero Offset Stability in Overlay Control: Trends and Prospects

Gutman, NadavNadavGutmanBaudemprez, BartBartBaudemprezYang, HongcheonHongcheonYangBeral, ChristopheChristopheBeralCharley, Anne-LaureAnne-LaureCharleyBouckou, LoembaLoembaBouckouGronheid, RoelRoelGronheidWeiss, YanivYanivWeissNapso, Sofia LinoySofia LinoyNapsoNagar-shaulZhang, ChufanChufanZhangKlein, DanaDanaKleinLamhot, YuvalYuvalLamhotLubashevsky, YuvalYuvalLubashevskyMilo, RenanRenanMiloMegged, EfiEfiMegged2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300014https://imec-publications.be/handle/20.500.12860/45957Optimization toward Non-Zero Offset Stability in Overlay Control: Trends and ProspectsProceedings paper10.1117/12.3051073978-1-5106-8639-7WOS:001514426300014