Evaluation of local CD and placement distribution on EUV mask and its impact on wafer

Vaenkatesan, VidyaVidyaVaenkatesanVan Adrichem, PaulPaulVan AdrichemKooiman, MarleenMarleenKooimanKubis, MichaelMichaelKubisVan Look, LieveLieveVan LookFrommhold, AndreasAndreasFrommholdGallagher, EmilyEmilyGallagherNam, DSDSNamMulkens, JanJanMulkensFinders, JoJoFindersRispens, GijsbertGijsbertRispens2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34167Evaluation of local CD and placement distribution on EUV mask and its impact on waferProceedings paper10.1117/12.2538243