Comparison of back side chrome focus monitor to focus self-metrology of an immersion scanner

D'have, KoenKoenD'haveMachida, TakahiroTakahiroMachidaLaidler, DavidDavidLaidlerCheng, ShauneeShauneeCheng2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12069Comparison of back side chrome focus monitor to focus self-metrology of an immersion scannerProceedings paper