Armini, SilviaSilviaArminiCarli, MartaMartaCarliSnauwaert, JohanJohanSnauwaertCherman, VladimirVladimirChermanDe Wolf, IngridIngridDe WolfSimons, VeerleVeerleSimonsMaestre Caro, ArantxaArantxaMaestre CaroMoonens, JosJosMoonensNeutens, PieterPieterNeutensArstila, KaiKaiArstilaOgi, J.J.OgiOda, S.S.OdaTsuchiya, YoshiYoshiTsuchiyaMizuta, HiroshiHiroshiMizuta2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16662Nanoscale selective silicon nanowires surface functionalization for sensing applicationsMeeting abstract