Carter, RichardRichardCarterCartier, EduardEduardCartierCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeynsKauerauf, ThomasThomasKaueraufKerber, AndreasAndreasKerberKubicek, StefanStefanKubicekLujan, GuilhermeGuilhermeLujanPantisano, LuigiLuigiPantisanoTsai, WilmanWilmanTsaiYoung, EdwardEdwardYoung2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5125Electrical characterization of high-k materials prepared by Atomic Layer CVD (ALCVD)Proceedings paper