Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability

Vermont, P.G.P.G.VermontPages, X.X.PagesGranneman, E.H.A.E.H.A.GrannemanVanormelingen, KoenKoenVanormelingenVerheyden, K.K.VerheydenMertens, SofieSofieMertens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13183Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatabilityJournal article