Onsia, BartBartOnsiaCaymax, MattyMattyCaymaxConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtDelabie, AnneliesAnneliesDelabieHeyns, MarcMarcHeynsMertens, PaulPaulMertensMeuris, MarcMarcMeurisSioncke, SonjaSonjaSionckeTheuwis, A.A.TheuwisVan Elshocht, SvenSvenVan ElshochtVan Steenbergen, JanJanVan SteenbergenVinckier, ChrisChrisVinckier2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9367Surface cleaning and preparation related aspects of the germanium surface chemistryOral presentation