Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography

Severi, JorenJorenSeveriDe Simone, DaniloDaniloDe SimoneDe Gendt, StefanStefanDe Gendt2022-01-252021-11-022022-01-2520202073-4360WOS:000602442500001https://imec-publications.be/handle/20.500.12860/38313Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV LithographyJournal article10.3390/polym12122971WOS:000602442500001SURFACEMEDLINE:33322737