Absil, PhilippePhilippeAbsilVan Campenhout, JorisJorisVan CampenhoutPantouvaki, MariannaMariannaPantouvakiVerheyen, PeterPeterVerheyenRosseel, ErikErikRosseelYu, HuiHuiYuSelvaraja, ShankarShankarSelvarajaBogaerts, WimWimBogaertsBaets, RoelRoelBaets2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18444A robust technology platform for high density silicon-based photonics integrationProceedings paper