A die-to-wafer bonding approach to photonics integration

Roelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12787A die-to-wafer bonding approach to photonics integrationOral presentation