Singh, ArjunArjunSinghChan, BTBTChanGronheid, RoelRoelGronheid2021-10-222021-10-2220150914-9244https://imec-publications.be/handle/20.500.12860/25915Hexagonal hole array patterning for memory applicationsJournal articlehttp://doi.org/10.2494/photopolymer.28.623