Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices

Sayan, SafakSafakSayanLin, DennisDennisLinAsselberghs, IngeIngeAsselberghsChiappe, DanieleDanieleChiappeSutar, SurajitSurajitSutarRadu, IulianaIulianaRaduThean, AaronAaronTheanPetermann, ClaireClairePetermannHong, Sung EunSung EunHong2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27272Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devicesOral presentationhttps://spie.org/AL16/conferencedetails/advances-resist-patterning-materials-processes