On the trap generation rate in ultrathin SiON under constant voltage stress

Degraeve, RobinRobinDegraeveKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/10358On the trap generation rate in ultrathin SiON under constant voltage stressJournal article