Monolithic integration of a spot size transformer with a planar buried heterostructure in GaAsP/InP-laser using the shadow masked growth technique

Moerman, IngridIngridMoermanD'Hondt, MarkMarkD'HondtVan Der Bauwhede, WimWimVan Der BauwhedeCoudenys, G.G.CoudenysHaes, JanJanHaesDe Dobbelaere, PeterPeterDe DobbelaereBaets, RoelRoelBaetsVan Daele, P.P.Van DaeleDemeester, PietPietDemeester2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/261Monolithic integration of a spot size transformer with a planar buried heterostructure in GaAsP/InP-laser using the shadow masked growth techniqueJournal article