Lindsay, RichardRichardLindsayHenson, KirklenKirklenHensonVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaexPawlak, BartekBartekPawlakDuffy, RayRayDuffySurdeanu, RaduRaduSurdeanuStolk, PeterPeterStolkKittl, JorgeJorgeKittlGiangrandi, SimoneSimoneGiangrandiPagès, XavierXavierPagèsVan der Jeugd, KeesKeesVan der Jeugd2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9205Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowthJournal article