Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity

Rosseel, ErikErikRosseelLu, J.PJ.PLuHikavyy, AndriyAndriyHikavyyVerheyen, PeterPeterVerheyenHoffmann, Thomas Y.Thomas Y.HoffmannRichard, OlivierOlivierRichardGeypen, JefJefGeypenBender, HugoHugoBenderLoo, RogerRogerLooAbsil, PhilippePhilippeAbsilMc Intosh, R.R.Mc IntoshFelch, S.S.FelchSchreutelkamp, RobRobSchreutelkamp2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12806Impact of sub-melt laser annealing on Si1-xGex source/drain defectivityProceedings paper