Layout-induced stress effects in 14nm & 10nm FinFETs and their impact on performance

Garcia Bardon, MarieMarieGarcia BardonMoroz, VictorVictorMorozEneman, GeertGeertEnemanSchuddinck, PieterPieterSchuddinckDehan, MorinMorinDehanYakimets, DmitryDmitryYakimetsJang, DoyoungDoyoungJangVan der Plas, GeertGeertVan der PlasMercha, AbdelkarimAbdelkarimMerchaThean, AaronAaronTheanVerkest, DiederikDiederikVerkestSteegen, AnAnSteegen2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22375Layout-induced stress effects in 14nm & 10nm FinFETs and their impact on performanceProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6576617&queryText%3DLayout-induced+stress+effects+in+14nm