Florent, KarineKarineFlorentLavizzari, SimoneSimoneLavizzariPopovici, Mihaela IoanaMihaela IoanaPopoviciDi Piazza, LucaLucaDi PiazzaCelano, UmbertoUmbertoCelanoGroeseneken, GuidoGuidoGroesenekenVan Houdt, JanJanVan Houdt2021-10-242021-10-2420170021-8979https://imec-publications.be/handle/20.500.12860/28343Understanding ferroelectric Al:HfO2 thin films with Si-based electrodes for 3D applicationsJournal articlehttp://aip.scitation.org/doi/abs/10.1063/1.4984068