Wouters, DirkDirkWoutersNorga, GerdGerdNorgaBeckers, FrançoiseFrançoiseBeckersBogaerts, LieveLieveBogaertsMaes, HermanHermanMaes2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2316Scaling of sol-gel PZT ferroelectric capacitors for low-voltage operationOral presentation