Rochus, VeroniqueVeroniqueRochusWang, BoBoWangTilmans, HarrieHarrieTilmansRay Chaudhuri, AsheshAsheshRay ChaudhuriHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriRottenberg, XavierXavierRottenberg2021-10-232021-10-2320160957-4158https://imec-publications.be/handle/20.500.12860/27223Fast analytical design of MEMS capacitive pressure sensors with sealed cavitiesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0957415816300502