Popovici, Mihaela IoanaMihaela IoanaPopoviciRedolfi, AugustoAugustoRedolfiAoulaiche, MarcMarcAoulaichevan den Berg, J.A.J.A.van den BergDouhard, BastienBastienDouhardSwerts, JohanJohanSwertsBailey, P.P.BaileyKaczer, BenBenKaczerGroven, BenjaminBenjaminGrovenMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardMoussa, AlainAlainMoussaAdelmann, ChristophChristophAdelmannDelabie, AnneliesAnneliesDelabieFazan, PierrePierreFazanVan Elshocht, SvenSvenVan ElshochtJurczak, GosiaGosiaJurczak2021-10-222021-10-2220150167-9317https://imec-publications.be/handle/20.500.12860/25771Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer depositionJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931715003019