Vesters, YannickYannickVestersDe Simone, DaniloDaniloDe SimoneDe Gendt, StefanStefanDe Gendt2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32209Alternative patterning mechanisms for Extreme Ultraviolet LithographyOral presentationhttps://www.chemcys.be/index.php/program/accepted-abstracts