Shamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivBoullart, WernerWernerBoullartBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-1820090018-1439https://imec-publications.be/handle/20.500.12860/16207Plasma etching: from micro to nanoelectronicsJournal article