Leuthold, J.J.LeutholdKoos, C.C.KoosFreude, W.W.FreudeAlloatti, L.L.AlloattiPalmer, R.R.PalmerKorn, D.D.KornPfeifle, J.J.PfeifleLauermann, M.M.LauermannDinu, R.R.DinuWehrli, S.S.WehrliJazbinsek, M.M.JazbinsekGunter, P.P.GunterWaldow, M.M.WaldowWahlbrink, T.T.WahlbrinkBolten, J.J.BoltenFournier, M.M.FournierFedeli, J.M.J.M.FedeliBogaerts, WimWimBogaertsYu, H.H.Yu2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22672High-speed, low-power optical modulators in siliconProceedings paper