Van Olmen, JanJanVan OlmenList, ScottScottListTokei, ZsoltZsoltTokeiCarbonell, LaureLaureCarbonellBrongersma, SywertSywertBrongersmaVolders, HennyHennyVoldersKunnen, EddyEddyKunnenHeylen, NancyNancyHeylenCiofi, IvanIvanCiofiKhandelwal, A.A.KhandelwalGelatos, J.J.GelatosMandrekar, T.T.MandrekarBoelen, PieterPieterBoelen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13080Cu resistivity scaling limits for 20 nm copper damascene linesProceedings paper