Illyefalvi-Vitez, Z.Z.Illyefalvi-VitezBerenyi, R.R.BerenyiGordon, P.P.GordonPinkola, J.J.PinkolaRuszinko, M.M.RuszinkoVanfleteren, JanJanVanfleteren2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5360Laser via generation into flexible substratesProceedings paper