Hoffmann, MichaelMichaelHoffmannSchenk, TonyTonySchenkKulemanov, IvanIvanKulemanovAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciSchroeder, UweUweSchroederMikolajick, ThomasThomasMikolajick2021-10-222021-10-2220140015-0193https://imec-publications.be/handle/20.500.12860/23950Low temperature compatible hafnium oxide based ferroelectricsJournal articlehttp://www.tandfonline.com/doi/abs/10.1080/00150193.2015.1012401