Spessot, AlessioAlessioSpessotRitzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramAoulaiche, MarcMarcAoulaicheCho, Moon JuMoon JuChoToledano Luque, MariaMariaToledano LuqueHoriguchi, NaotoNaotoHoriguchiFazan, PierrePierreFazan2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25935Reliability impact of advanced doping techniques for DRAM peripheral MOSFETsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165890