Study on 3D self-aligned assembly using chips with etched edge and SAM for liquid

Liu, YongYongLiuDerakhshandeh, JaberJaberDerakhshandehGao, YaoYaoGaoRebibis, Kenneth JuneKenneth JuneRebibisDe Wolf, IngridIngridDe WolfLi, PeiPeiLi2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31213Study on 3D self-aligned assembly using chips with etched edge and SAM for liquidProceedings paperhttps://ieeexplore.ieee.org/document/8374304