Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersDoms, MathiasMathiasDomsAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36886Effect of surface chemistry on Ruthenium wet etchingProceedings paperhttps://doi.org/10.4028/www.scientific.net/SSP.314.302