Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces

Raineri, VitoVitoRaineriPrivitera, VittorioVittorioPriviteraVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.HellemansSnauwaerts, JanJanSnauwaerts2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/306Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched SurfacesJournal article