Grain size and orientation in ternary Co1-xNixSi2 thin films on Si(100): influence of the Ni content

Smeets, D.D.SmeetsVantomme, AndreAndreVantommeDrijbooms, ChrisChrisDrijboomsBender, HugoHugoBender2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9612Grain size and orientation in ternary Co1-xNixSi2 thin films on Si(100): influence of the Ni contentOral presentation