Development and optimization of scanning spreading resistance microscopy for measuring the two-dimensional carrier profile in solar cell structures

Eyben, PierrePierreEybenSeidel, FelixFelixSeidelHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeLorenz, AnneAnneLorenzUruena De Castro, AngelAngelUruena De CastroVan Gestel, DriesDriesVan GestelJohn, JoachimJoachimJohnHorzel, JörgJörgHorzelVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-1920110031-8965https://imec-publications.be/handle/20.500.12860/18892Development and optimization of scanning spreading resistance microscopy for measuring the two-dimensional carrier profile in solar cell structuresJournal article