Van Cauwenberghe, MarcMarcVan CauwenbergheTutunjyan, NinaNinaTutunjyanJamieson, GeraldineGeraldineJamiesonVerdonck, PatrickPatrickVerdonckHuyghebaert, CedricCedricHuyghebaertJourdain, AnneAnneJourdainConard, ThierryThierryConardBoullart, WernerWernerBoullartTravaly, YoussefYoussefTravalySwinnen, BartBartSwinnen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18153Si recess etch for 3D stacked IC applications.Meeting abstract