Xu, KaidongKaidongXuVos, RitaRitaVosVereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsKraus, H.H.KrausMertens, PaulPaulMertensVinckier, ChrisChrisVinckierKovacs, F.F.Kovacs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11578Measurement of nanoparticles on silicon wafer surface using haze signal by light scatteringProceedings paper