Kahouli, A.A.KahouliSylvestre, A.A.SylvestreLaithier, J.-F.J.-F.LaithierLutsen, LaurenceLaurenceLutsenPairis, S.S.PairisAndré, E.E.AndréGarden, J.-L.J.-L.Garden2021-10-222021-10-2220140254-0584https://imec-publications.be/handle/20.500.12860/24025Structural and dielectric properties of parylene-VT4 thin filmsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0254058413006469