Tokei, ZsoltZsoltTokeiLanckmans, FilipFilipLanckmansVan den Bosch, GeertGeertVan den BoschVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaexBender, HugoHugoBenderHens, S.S.HensVan Landuyt, J.J.Van Landuyt2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6885Reliability of copper dual damascene influenced by pre-cleanProceedings paper