Moens, P.P.MoensRoig, J.J.RoigMeersman, J.J.MeersmanBaele, J.J.BaeleDesoete, B.B.DesoeteTack, M.M.TackDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14181μ-Raman validated stress-enhanced mobility in XtreMOS transistorsProceedings paper