Yi, LindaLindaYiBekaert, JoostJoostBekaertGronheid, RoelRoelGronheidFenger, GermainGermainFengerNafus, KathleenKathleenNafusWong, H.-S.H.-S.Wong2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26217Study of DSA interaction range using Gaussian convolutionProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2211993