Pawlak, BartekBartekPawlakDuffy, RayRayDuffyJanssens, TomTomJanssensVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaexSmith, A.J.A.J.SmithCowern, N.E.BN.E.BCowernDao, T.T.DaoTamminga, Y.Y.Tamminga2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11007Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowthJournal article